US Patent 11769681 Transfer robot and substrate processing apparatus having the same
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US Patent 11769681 Transfer robot and substrate processing apparatus having the same
Article
Patent abstract
The present invention disclosed herein relates to a transfer robot and a substrate processing apparatus having the same, and more particularly, to a transfer robot for transferring a substrate through a transfer module and a substrate processing apparatus having the same. The substrate processing system according to the present invention includes: a transfer module (
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Patent Jurisdiction
Patent Number
Patent Inventor Names
Dong Sun Ko
Hun Hee Na
Kyung Hee Jeon
Date of Patent
September 26, 2023
Patent Application Number
17200510
Date Filed
March 12, 2021
Patent Citations
Patent Primary Examiner
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