Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yu-Ming Lin
Chia-Hao Chang
Jia-Chuan You
Wai-Yi Lien
Date of Patent
September 26, 2023
Patent Application Number
17464012
Date Filed
September 1, 2021
Patent Citations
...
Patent Primary Examiner
Patent abstract
A device includes a substrate, a first metal feature over the substrate, first and second spacers, a first dielectric layer, and a second metal feature. The first and second spacers are on opposite sidewalls of the conductive feature, respectively. The first dielectric layer is in contact with the first spacer, in which a top surface of the protection layer is higher than a top surface of the first spacer. The second metal feature is electrically connected to the first metal structure and in contact with a top surface and a sidewall of the protection layer.
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