Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tomoyasu Hasegawa
Takaaki Matsumoto
Tomohiro Iwano
Date of Patent
October 3, 2023
Patent Application Number
16497558
Date Filed
January 29, 2018
Patent Citations
Patent Primary Examiner
Patent abstract
A polishing liquid containing abrasive grains, a hydroxy acid, a polyol, a cationic compound, and a liquid medium, in which a zeta potential of the abrasive grains is positive and a weight average molecular weight of the cationic compound is less than 1000.
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