Patent attributes
In a flow rate controller and a drive device, a housing is provided therein with a first flow passage, a second flow passage adjacent to the first flow passage, a first throttle valve provided to the first flow passage, and a second throttle valve provided to the second flow passage. A pilot check valve is provided to the second flow passage and is connected in series to the second throttle valve. A pilot air flow passage communicates with a pilot port of the pilot check valve for supplying and discharging pilot air, and a third throttle valve is provided to the pilot air flow passage. In response to the pressure of the pilot air, the pilot check valve switches between a state in which the passage of exhaust air discharged from an air cylinder is permitted and a state in which passage of the exhaust air is prevented.
