US Patent 11774017 Pipe connection structure and processing apparatus
Patent 11774017 was granted and assigned to Tokyo Electron on October, 2023 by the United States Patent and Trademark Office.
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US Patent 11774017 Pipe connection structure and processing apparatus
Article
Patent abstract
A pipe connection structure provided in a processing apparatus, includes a first pipe having a first flange portion formed at one end thereof, a second pipe having a second flange portion formed at one end thereof and connected to the first flange portion, and a pipe clamp configured to connect and fasten the first flange portion and the second flange portion at a plurality of positions including a position where a pipe axis of the first pipe and a pipe axis of the second pipe do not coincide with each other.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takashi Yoshida
Date of Patent
October 3, 2023
Patent Application Number
17654281
Date Filed
March 10, 2022
Patent Citations
Patent Primary Examiner
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