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US Patent 11776108 Deep learning based defect detection
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Patent
Date Filed
January 21, 2021
Date of Patent
October 3, 2023
Patent Application Number
17155037
Patent Citations
US Patent 8126255 Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions
US Patent 8664594 Electron-optical system for high-speed and high-sensitivity inspections
US Patent 8692204 Apparatus and methods for electron beam detection
US Patent 8698093 Objective lens with deflector plates immersed in electrostatic lens field
US Patent 8716662 Methods and apparatus to review defects using scanning electron microscope with multiple electron beam configurations
US Patent 9915625 Optical die to database inspection
US Patent 9222895 Generalized virtual inspector
US Patent 11320357 System and method for estimation of rock properties from core images
US Patent 7570796 Methods and systems for utilizing design data in combination with inspection data
US Patent 7676077 Methods and systems for utilizing design data in combination with inspection data
Patent Inventor Names
Richard Wallingford
Ge Cong
Sangbong Park
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11776108
Patent Primary Examiner
Tuan H Nguyen
CPC Code
G06T 2207/30148
G06T 2207/20084
G06N 3/08
G06N 3/04
G06T 7/70
G06K 9/62
G06K 9/6256
G06T 7/00
G06T 7/0006
G06N 3/0454
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