Patent attributes
A method is provided for forming a semiconductor product including providing a substrate comprising a buried power rail; forming a sacrificial plug at a contact surface on the buried power rail; applying a front-end-of-line module for forming devices in the semiconductor substrate; providing a Via, through layers applied by the front-end-module, which joins the sacrificial plug on the buried power rail; selectively removing the sacrificial plug thereby obtaining a cavity above the buried power rail; filling the cavity with a metal to electrically connect the devices with the buried power rail, wherein the sacrificial plug is formed such that the contact surface area is larger than an area of a cross-section of the Via parallel with the contact surface.
