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US Patent 11778825 Method of fabricating a vertical semiconductor device

Overview Structured Data Issues Contributors Activity

Is a

Date Filed

March 24, 2022

Date of Patent

October 3, 2023

Patent Application Number

17702967

Patent Citations

US Patent 9997534 Vertical memory devices

US Patent 9985098 Bulb-shaped memory stack structures for direct source contact in three-dimensional memory device

US Patent 10062707 Semiconductor device and method of manufacturing the same

US Patent 9355727 Three-dimensional memory structure having a back gate electrode

US Patent 9978771 Manufacturing method of semiconductor device including multi-layered source layer and channel extending therethrough

Patent Inventor Names

Minkyung Bae

Taehun Kim

Myunghun Woo

Doohee Hwang

Bongyong Lee

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Primary Examiner

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