Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael Kuntzman
Vahid Naderyan
Faisal Zaman
Michael Pedersen
Xin Song
Date of Patent
October 10, 2023
Patent Application Number
17518350
Date Filed
November 3, 2021
Patent Citations
...
Patent Primary Examiner
Patent abstract
A MEMS diaphragm assembly comprises a first diaphragm, a second diaphragm, and a stationary electrode assembly spaced between the first and second diaphragms and including a plurality of apertures disposed therethrough. Each of a plurality of pillars is disposed through one of the plurality of apertures and connects the first and second diaphragms. At least one of the first and second diaphragms is connected to the stationary electrode assembly at a geometric center of the assembly.
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