US Patent 11781379 Beam-steering system based on a MEMS-actuated vertical-coupler array
Is a
Date Filed
July 14, 2022
Date of Patent
October 10, 2023
Patent Application Number
17865131
Patent Inventor Names
Andrew S Michaels
Ming Chiang A Wu
Johannes Henriksson
Xiaosheng Zhang
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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