Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuya Akeboshi
Fuyuma Ito
Yasuhito Yoshimizu
Hakuba Kitagawa
Date of Patent
October 10, 2023
Patent Application Number
16950389
Date Filed
November 17, 2020
Patent Citations
...
Patent Primary Examiner
Patent abstract
According to an embodiment, a substrate treatment apparatus includes a hair member including a noble metal, and a liquid chemical supply member to supply a liquid chemical. While a tip part of the hair member is contact with a predetermined surface of a metal, the liquid chemical is supplied onto the surface of the metal, and the metal is removed with etching.
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