US Patent 11784144 Semiconductor devices comprising planar waveguide transmission lines
Patent 11784144 was granted and assigned to Infineon Technologies on October, 2023 by the United States Patent and Trademark Office.
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US Patent 11784144 Semiconductor devices comprising planar waveguide transmission lines
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Patent abstract
A semiconductor device comprises a first semiconductor chip, a first planar waveguide transmission line arranged within a BEOL metal stack of the first semiconductor chip, wherein the first planar waveguide transmission line comprises line sections situated opposite one another, and a second planar waveguide transmission line arranged over the first semiconductor chip and electrically coupled to the first planar waveguide transmission line, wherein the second planar waveguide transmission line comprises line sections situated opposite one another.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Horst Theuss
Date of Patent
October 10, 2023
Patent Application Number
16885780
Date Filed
May 28, 2020
Patent Citations
Patent Primary Examiner
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