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US Patent 11786841 Systems and methods for purifying solvents

Patent 11786841 was granted and assigned to FUJIFILM Electronic Materials U.S.A., Inc. on October, 2023 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

FUJIFILM Electronic Materials U.S.A., Inc.

Current Assignee

FUJIFILM Electronic Materials U.S.A., Inc.

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

11786841

Patent Inventor Names

Pejman Ahmadiannamini

Bryan Hinzie

Date of Patent

October 17, 2023

Patent Application Number

17149836

Date Filed

January 15, 2021

Patent Citations

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US Patent 10322952 Methods to de-salt source water

Patent Primary Examiner

CPC Code

Patent abstract

The present disclosure is directed to methods and systems of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process.

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