Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jereld Lee Winkler
Date of Patent
October 17, 2023
Patent Application Number
16911189
Date Filed
June 24, 2020
Patent Citations
...
Patent Primary Examiner
Patent abstract
A semiconductor processing device is disclosed. The semiconductor device includes a reactor and a vaporizer configured to provide a reactant vapor to the reactor. The device can include a process control chamber between the vaporizer and the reactor. The device can include a control system configured to modulate a pressure in the process control chamber based at least in part on feedback of measured pressure in the process control chamber.
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