US Patent 11791181 Methods for the treatment of workpieces
All edits
Edits on 19 Oct, 2023
Golden AI
Edits made to:
Infobox (+17 properties)
Article (+694 characters)
US Patent 11791181 Methods for the treatment of workpieces
Article
Patent abstract
Systems and methods for thermal treatment of a workpiece are provided. In one example, a method for conducting a treatment process on a workpiece, such as a thermal treatment process, an annealing treatment process, an oxidizing treatment process, or a reducing treatment process in a processing apparatus is provided. The processing apparatus includes a plasma chamber and a processing chamber. The plasma chamber and the processing chamber are separated by a plurality of separation grids or grid plates. The separation grids or grid plates operable to filter ions generated in the plasma chamber. The processing chamber has a workpiece support operable to support a workpiece.
Infobox
Is a
Patent Jurisdiction
Patent Number
Patent Inventor Names
Haichun Yang
Haochen Li
Hua Chung
Michael X. Yang
Shawming Ma
Ting Xie
Xinliang Lu
Date of Patent
October 17, 2023
Patent Application Number
17024851
Date Filed
September 18, 2020
Patent Citations
Patent Primary Examiner
Find more entities like US Patent 11791181 Methods for the treatment of workpieces
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
