US Patent 11791243 Semiconductor device and method of manufacture
Patent 11791243 was granted and assigned to Taiwan Semiconductor Manufacturing Company on October, 2023 by the United States Patent and Trademark Office.
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US Patent 11791243 Semiconductor device and method of manufacture
A semiconductor device including a test pad contact and a method of manufacturing the semiconductor device are disclosed. In an embodiment, a semiconductor device may include a first metal feature and a second metal feature disposed in a single top metal layer over a substrate. A test pad may be formed over and electrically connected to the first metal feature. A first passivation layer may be formed over the second metal feature and the test pad and may cover top and side surfaces of the test pad. A first via may be formed penetrating the first passivation layer and contacting the test pad and a second via may be formed penetrating the first passivation layer and contacting the second metal feature.
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