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US Patent 11804356 Apparatus using multiple beams of charged particles
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Patent
Date Filed
March 28, 2022
Date of Patent
October 31, 2023
Patent Application Number
17656731
Patent Citations
US Patent 8294095 Apparatus of plural charged particle beams with multi-axis magnetic lens
US Patent 9607805 Apparatus of plural charged-particle beams
US Patent 9691588 Apparatus of plural charged-particle beams
US Patent 9922799 Apparatus of plural charged-particle beams
US Patent 10141160 Apparatus of plural charged-particle beams
US Patent 10395886 Apparatus of plural charged-particle beams
US Patent 10236156 Apparatus of plural charged-particle beams
US Patent 11289304 Apparatus using multiple beams of charged particles
US Patent 6943349 Multi beam charged particle device
US Patent 7244949 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
Patent Inventor Names
Xuedong Liu
Xuerang Hu
Weiming Ren
Zhong-wei Chen
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11804356
Patent Primary Examiner
Nicole M Ippolito
CPC Code
H01J 2237/038
H01J 2237/0435
H01J 2237/0213
H01J 37/12
H01J 37/1477
H01J 37/26
H01J 2237/0262
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