Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard Alan Haight
Vivekananda P. Adiga
Hanhee Paik
Martin O. Sandberg
Date of Patent
October 31, 2023
Patent Application Number
17450769
Date Filed
October 13, 2021
Patent Citations
Patent Primary Examiner
Patent abstract
Techniques regarding encapsulating one or more superconducting devices of a quantum processor are provided. For example, one or more embodiments described herein can regard a method that can comprise depositing a metal fluoride layer onto a superconducting resonator and a silicon substrate that can be comprised within a quantum processor. The superconducting resonator can be positioned on the silicon substrate. Also, the metal fluoride layer can coat the superconducting resonator.
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