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US Patent 11835546 Characterization of nanoindented and scratch induced accoustic events

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
May 29, 2022
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Date of Patent
December 5, 2023
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Patent Application Number
17827759
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Patent Citations
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US Patent 7289202 Methods for testing durable optical elements
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US Patent 7492451 Simultaneous multi-spot inspection and imaging
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US Patent 7543519 Device for high-precision generation and measurement of forces and displacements
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US Patent 7624640 Opto-acoustic methods and apparatus for performing high resolution acoustic imaging and other sample probing and modification operations
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US Patent 7649624 Systems and methods for detecting scratches on non-semiconductor wafer surfaces
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US Patent 7814565 Nanostructure on a probe tip
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US Patent 7845214 Device and method for optical nanoindentation measurement
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US Patent 7973547 Method and apparatus for detecting a crack in a semiconductor wafer, and a wafer chuck
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US Patent 8003939 Foreign matter or abnormal unsmoothness inspection apparatus and foreign matter or abnormal unsmoothness inspection method
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US Patent 8087282 Test management method for indentation tester and indentation tester
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•••
Patent Citations Received
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US Patent 12000861 System and method for a non-tapping mode scattering-type scanning near-field optical microscopy
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Patent Inventor Names
Antanas Daugela
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11835546
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Patent Primary Examiner
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Nicole M Ippolito
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CPC Code
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G01Q 30/04
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