Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chuanwen Lin0
Takeshi Nagata0
Jun Hatakeyama0
Date of Patent
December 5, 2023
0Patent Application Number
173427170
Date Filed
June 9, 2021
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A resist composition is provided comprising a base polymer and a quencher comprising a salt compound obtained from a nitrogen-containing compound having an iodized aromatic ring bonded to the nitrogen atom via a C
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
