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US Patent 11835871 Imprint apparatus, imprint method, and article manufacturing method
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Edits on 7 Dec, 2023
"Created via: Patent importer"
Golden AI
created this topic on 7 Dec, 2023
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US Patent 11835871 Imprint apparatus, imprint method, and article manufacturing method
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Patent
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11835871
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Patent Inventor Names
Satoshi Iino
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Date of Patent
December 5, 2023
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Patent Application Number
17064171
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Date Filed
October 6, 2020
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Patent Citations
US Patent 8768665 Site based quantification of substrate topography and its relation to lithography defocus and overlay
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US Patent 9594301 Imprint apparatus and article manufacturing method using same
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US Patent 9993962 Method of imprinting to correct for a distortion within an imprint system
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Patent Primary Examiner
Robert J Grun
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