Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Oliver Pitts0
Omid Salehzadeh Einabad0
Date of Patent
December 5, 2023
0Patent Application Number
174144200
Date Filed
December 9, 2019
0Patent Primary Examiner
Patent abstract
An avalanche photodiode with a diffused junction and the method for its fabrication are disclosed. The method comprising forming, on a substrate, a first high-doped region and a low-doped region; performing selective area growth (SAG) with in-situ etchant on the low-doped region to grow a SAG structure; and diffusing through the SAG structure to form a second high-doped region in the low-doped region.
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