Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hojin Lee0
Ahreum Oh0
Jekwan Ryu0
Date of Patent
December 12, 2023
0Patent Application Number
177412400
Date Filed
May 10, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A particle detection method detects presence and location of particles on a target using measured signals from a plurality of structured illumination patterns. The particle detection method uses measured signals obtained by illuminating the target with structured illumination patterns to detect particles. Specifically, the degree of variation in these measured signals in raw images is calculated to determine whether a particle is present on the target at a particular area of interest.
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