Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Han-De Chen0
Yee-Chia Yeo0
Huicheng Chang0
Tsai-Yu Huang0
Date of Patent
December 12, 2023
0Patent Application Number
171500180
Date Filed
January 15, 2021
0Patent Primary Examiner
Patent abstract
In an embodiment, a device includes: a first semiconductor strip over a substrate, the first semiconductor strip including a first channel region; a second semiconductor strip over the substrate, the second semiconductor strip including a second channel region; a dielectric strip disposed between the first semiconductor strip and the second semiconductor strip, a width of the dielectric strip decreasing along a first direction extending away from the substrate, the dielectric strip including a void; and a gate structure extending along the first channel region, along the second channel region, and along a top surface and sidewalls of the dielectric strip.
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