Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Christopher Su-Yan Own0
Date of Patent
December 26, 2023
0Patent Application Number
167024740
Date Filed
December 3, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
A coater is provided for depositing a coating onto a sequence of samples to be analyzed in a microscope. The coater includes a process chamber to maintain a low-pressure vacuum or controlled gaseous environment at a deposition region inside the process chamber, a sample conveyor to support and convey samples through the deposition region, an evaporant supply to vaporize material from an evaporant source onto the samples at the deposition region, and a controller to control one or more operations of the coater.
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