US Patent 11851274 Conveyance apparatus and manufacturing method of article

A conveyance apparatus includes a stator in which a plurality of coils is arranged along a first direction and a movable element to move along the plurality of coils. The stator includes a first magnet group including a plurality of first magnets arranged along the first direction and magnetized in one direction. The movable element includes a second magnet group including a plurality of second magnets arranged to face the plurality of coils, and a third magnet group including a plurality of third magnets arranged to face the first magnet group and magnetized in a direction repelling the first magnet group.