Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mohith Verghese0
Dmitrii Leshchev0
Jose Alexandro Romero0
Kunal Bhatnagar0
Date of Patent
December 26, 2023
0Patent Application Number
171834740
Date Filed
February 24, 2021
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
Methods for depositing molybdenum films on a substrate are described. The substrate is exposed to a molybdenum halide precursor and an aluminum precursor to form the molybdenum film (e.g., elemental molybdenum) at a low temperature. The exposures can be sequential or simultaneous.
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