US Patent 11854845 System for monitoring environment
Patent 11854845 was granted and assigned to ChangXin Memory Technologies on December, 2023 by the United States Patent and Trademark Office.
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US Patent 11854845 System for monitoring environment
A system for monitoring an environment can be used for monitoring concentrations of airborne contaminants in a plurality of process areas in a clean room. The system includes: a sampling device, configured to collect environmental samples from process areas and including a system sampling pipeline, the environmental sample including air; an analysis device, connected to an output end of the system sampling pipeline; an air supply device, connected to the system sampling pipeline and configured to provide a purge gas to the system sampling pipeline; and a humidification device, configured to provide water mist and connected between the air supply device and the system sampling pipeline.
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