Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasuhisa Ishima0
Date of Patent
January 2, 2024
0Patent Application Number
170174870
Date Filed
September 10, 2020
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
According to one embodiment, an edge ring is provided which includes a first movable portion provided along an outer circumference of a support portion having an upper surface capable of holding a semiconductor substrate thereon, the first movable portion being movable in a direction perpendicular to the upper surface; a second movable portion provided along an outer circumference of the first movable portion, the second movable portion being movable in the direction; and a driving portion capable of moving the first movable portion in the direction by way of the second movable portion.
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