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US Patent 11862498 Substrate processing apparatus

Overview Structured Data Issues Contributors Activity

Is a

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Date Filed

October 18, 2022

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Date of Patent

January 2, 2024

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Patent Application Number

18047532

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Patent Citations

US Patent 7436135 Method for controlling stage apparatus

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US Patent 10222237 Displacement devices and methods and apparatus for detecting and estimating motion associated with same

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US Patent 10348177 Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same

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US Patent 10348178 Methods and systems for controllably moving multiple moveable stages in a displacement device

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US Patent 10554110 Displacement devices and methods for fabrication, use and control of same

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US Patent 10636687 Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber

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US Patent 10704927 Displacement devices and methods and apparatus for detecting and estimating motion associated with same

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US Patent 10707738 Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same

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US Patent 10763733 Methods and systems for controllably moving one or more moveable stages in a displacement device

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US Patent 10819205 Methods and systems for controllably moving multiple moveable stages in a displacement device

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Patent Inventor Names

Jairo T. Moura

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Roumen Botev

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

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Patent Primary Examiner

James R Bidwell

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CPC Code

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