US Patent 11875974 Multi-channel plasma reaction cell

A plasma reaction cell includes a discharge chamber with a base plate, a side wall, and a cooling plate. A discharge stack mounted within the discharge chamber includes a first insulation plate, a first conductive spacer, a second insulation plate, and a second conductive spacer. An electrode electrically coupled to the first conductive spacer extends through the side wall of the discharge chamber. A first gas channel formed between the first conductive spacer and the first insulation plate has a first end in fluid communication with a first gas port and a second end in fluid communication with a second gas port. A second gas channel formed between the first conductive spacer and the second insulation plate has a first end in fluid communication with the first gas port and a second end in fluid communication with the second gas port.