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US Patent 11876126 Method for manufacturing semiconductor device
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Patent
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Date Filed
August 10, 2021
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Date of Patent
January 16, 2024
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Patent Application Number
17398037
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Patent Citations
US Patent 7323356 LnCuO(S,Se,Te)monocrystalline thin film, its manufacturing method, and optical device or electronic device using the monocrystalline thin film
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US Patent 7732819 Semiconductor device and manufacturing method thereof
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US Patent 8003981 Field effect transistor using oxide film for channel and method of manufacturing the same
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US Patent 8384076 Transistors, semiconductor devices and methods of manufacturing the same
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US Patent 8461007 Method for manufacturing semiconductor device
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US Patent 8530289 Method for manufacturing semiconductor device
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US Patent 8546225 Method for manufacturing semiconductor device
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US Patent 8546892 Semiconductor device and method for manufacturing semiconductor device
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US Patent 8624240 Top gate thin film transistor and display apparatus including the same
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US Patent 8686416 Oxide semiconductor film and semiconductor device
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•••
Patent Inventor Names
Masami Jintyou
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Yukinori Shima
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Shunpei Yamazaki
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11876126
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Patent Primary Examiner
Mohammad M Hoque
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CPC Code
H01L 21/02565
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H01L 21/02573
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H01L 21/02472
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H01L 21/0234
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H01L 21/02483
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H01L 21/0262
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H01L 21/02554
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H01L 29/7869
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H01L 29/4908
0
H01L 21/47573
0
•••
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