Patent attributes
The invention provides an acceleration sensor, including a sensing unit, a sensing unit includes a ring-shaped outer coupling unit; seesaw structures, including at least two and arranged on an inner side of the outer coupling unit; an inner coupling unit, including an inner coupling elastic beam connecting two adjacent seesaw structures; proof mass blocks fixed on the outer coupling unit or the inner coupling unit or the seesaw structures; an in-plane coupling elastic member elastically connecting the seesaw structures to the outer coupling unit; in-plane displacement detection devices arranged on the proof mass blocks and configured to detect movements of the proof mass blocks along the first direction and/or along the second direction; and out-of-plane displacement detection devices arranged on the outer coupling unit and/or the seesaw structures and/or the inner coupling unit configured to detect movements of the seesaw structures along the third direction.
