US Patent 11886001 Optical waveguide fabrication process

Methods of fabricating a waveguide module are presented that include the steps of providing a glass substrate having first and second substantially planar parallel surfaces and comprising one or more cells in a first arrangement and singulating the glass substrate to produce one or more singulated cells. Singulated cells are treated with a chemical agent, laminated to a carrier substrate, processed, and delaminated from the carrier wafer and optionally subjected to further processing.