US Patent 11889283 Triple-membrane MEMS device
Patent 11889283 was granted and assigned to Infineon Technologies on January, 2024 by the United States Patent and Trademark Office.
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US Patent 11889283 Triple-membrane MEMS device
Article
Patent abstract
A system includes a first membrane, a second membrane and a third membrane spaced apart from one another, wherein the second membrane is between the first membrane and the third membrane, and the second membrane comprises a plurality of openings, a sealed low pressure chamber between the first membrane and the third membrane, and a plurality of electrodes in the sealed low pressure chamber.
Infobox
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Andreas Wiesbauer0
Athanasios Kollias0
Marc Fueldner0
Date of Patent
January 30, 2024
0Patent Application Number
171285870
Date Filed
December 21, 2020
0Patent Citations
Patent Primary Examiner
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