Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kartik Ramaswamy0
Daniel Sang Byun0
Jaeyong Cho0
Date of Patent
February 6, 2024
0Patent Application Number
169391600
Date Filed
July 27, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
Embodiments of a process kit are provided herein. In some embodiments, a process kit for use in a substrate processing chamber includes: a ceramic ring having an upper surface and a lower surface, wherein the ceramic ring includes a chucking electrode disposed in the ceramic ring and a heating element disposed in the ceramic ring; and an edge ring disposed on the ceramic ring.
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