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US Patent 11895844 Semiconductor memory device
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Patent
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Date Filed
March 12, 2021
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Date of Patent
February 6, 2024
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Patent Application Number
17199888
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Patent Citations
US Patent 10553608 Semiconductor memory device
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US Patent 10985176 Three-dimensional memory device containing eye-shaped contact via structures located in laterally-undulating trenches and method of making the same
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US Patent 9240347 Tungsten feature fill
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US Patent 9418934 Structure and fabrication method for electromigration immortal nanoscale interconnects
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US Patent 9793293 Semiconductor device and method for manufacturing same
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US Patent 10090319 Semiconductor device and method for manufacturing the same
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US Patent 10141329 Method for manufacturing semiconductor memory device and semiconductor memory device
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Patent Inventor Names
Genki Kawaguchi
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11895844
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Patent Primary Examiner
Mary A Wilczewski
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CPC Code
H01L 21/76816
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H01L 21/76865
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H01L 23/5226
0
H01L 21/76831
0
H01L 21/76877
0
H01L 29/7926
0
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