US Patent 11908664 Plasma processing apparatus
Patent 11908664 was granted and assigned to Tokyo Electron on February, 2024 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 4, 2022
0
Date of Patent
February 20, 2024
0
Patent Applicant
Patent Application Number
17981265
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Patent Citations
Patent Inventor Names
Naohiko Okunishi
0
Nozomu Nagashima
0
Tomoyuki Takahashi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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