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US Patent 11917767 Apparatus for manufacturing printed circuit boards
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Patent
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Date Filed
June 29, 2018
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Date of Patent
February 27, 2024
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Patent Application Number
16633840
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Patent Citations
US Patent 8206548 Substrate processing apparatus and substrate processing method
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US Patent 8530359 Modulated metal removal using localized wet etching
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US Patent 7476290 Substrate processing apparatus and substrate processing method
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US Patent 8211242 Substrate processing method, substrate processing apparatus, and control program
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Patent Inventor Names
Christian Schmid
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11917767
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Patent Primary Examiner
Donghai D Nguyen
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CPC Code
H05K 2203/0169
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H05K 2203/075
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H05K 2203/1509
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H05K 2203/1554
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H05K 2203/1572
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H01L 21/6708
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H01L 21/31133
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H01L 21/32134
0
Y10T 29/49155
0
Y10T 29/532
0
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