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US Patent 11921052 Inspection with previous step subtraction

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
March 29, 2023
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Date of Patent
March 5, 2024
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Patent Application Number
18128203
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Patent Citations
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US Patent 9613411 Creating defect classifiers and nuisance filters
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US Patent 10395358 High sensitivity repeater defect detection
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US Patent 10504213 Wafer noise reduction by image subtraction across layers
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US Patent 10533848 Metrology and control of overlay and edge placement errors
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US Patent 10535131 Systems and methods for region-adaptive defect detection
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US Patent 10557802 Capture of repeater defects on a semiconductor wafer
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US Patent 10599944 Visual feedback for inspection algorithms and filters
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US Patent 10801968 Algorithm selector based on image frames
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US Patent 10923317 Detecting defects in a logic region on a wafer
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US Patent 10943838 Measurement of overlay error using device inspection system
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•••
Patent Inventor Names
Abdurrahman Sezginer
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Dmitri Starodub
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Robert M. Danen
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Sangbong Park
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11921052
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Patent Primary Examiner
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Yubin Hung
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CPC Code
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G06T 2207/30148
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G06T 2207/20224
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G06T 2207/20081
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G06T 2207/10152
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G01N 21/8851
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G01N 2021/8887
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G06T 5/002
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G06T 5/50
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G06T 7/001
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H01L 22/12
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•••

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