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US Patent 11921059 Inspection apparatus and inspection method
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Patent
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Date Filed
July 11, 2023
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Date of Patent
March 5, 2024
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Patent Application Number
18350093
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Patent Citations
US Patent 11004646 X-ray tube and X-ray generation device
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US Patent 11467107 X-ray analysis apparatus and x-ray generation unit
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US Patent 6850598 X-ray anode and process for its manufacture
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US Patent 7221731 X-ray microscopic inspection apparatus
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US Patent 7916834 Small spot X-ray fluorescence (XRF) analyzer
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US Patent 9213007 Foreign matter detector
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US Patent 9551677 Angle calibration for grazing-incidence X-ray fluorescence (GIXRF)
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US Patent 9594036 X-ray surface analysis and measurement apparatus
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US Patent 10295486 Detector for X-rays with high spatial and high spectral resolution
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US Patent 10803574 Inline x-ray measurement apparatus and method
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•••
Patent Inventor Names
Takeo Tsukamoto
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11921059
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Patent Primary Examiner
Thomas R Artman
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