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US Patent 11922619 Context-based defect inspection

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
March 29, 2023
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Date of Patent
March 5, 2024
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Patent Application Number
18128140
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Patent Citations
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US Patent 9613411 Creating defect classifiers and nuisance filters
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US Patent 9619876 Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modes
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US Patent 10346740 Systems and methods incorporating a neural network and a forward physical model for semiconductor applications
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US Patent 10395358 High sensitivity repeater defect detection
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US Patent 10504213 Wafer noise reduction by image subtraction across layers
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US Patent 10533848 Metrology and control of overlay and edge placement errors
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US Patent 10535131 Systems and methods for region-adaptive defect detection
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US Patent 10557802 Capture of repeater defects on a semiconductor wafer
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US Patent 10599944 Visual feedback for inspection algorithms and filters
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US Patent 10801968 Algorithm selector based on image frames
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•••
Patent Inventor Names
Oriel Ben Shmuel
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Bradley Ries
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Ron Dekel
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Yakir Gorski
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Shlomi Fenster
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Emanuel Garbin
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Asaf J. Elron
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Brian Duffy
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Laurent Karsenti
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Sasha Smekhov
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11922619
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Patent Primary Examiner
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Ping Y Hsieh
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CPC Code
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G06T 2207/30148
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G06T 2207/20084
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G06T 2207/20076
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G06T 7/001
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