Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takeo Tsukamoto0
Date of Patent
March 12, 2024
0Patent Application Number
183500540
Date Filed
July 11, 2023
0Patent Citations
Patent Primary Examiner
Patent abstract
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.
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