Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zhigang Chen0
Shahid Rauf0
Leonid Dorf0
Kenneth S. Collins0
Kartik Ramaswamy0
Igor Markovsky0
James D. Carducci0
Nipun Misra0
...
Date of Patent
March 19, 2024
0Patent Application Number
181684210
Date Filed
February 13, 2023
0Patent Citations
0
...
Patent Primary Examiner
Patent abstract
The disclosure pertains to a capacitively coupled plasma source in which VHF power is applied through an impedance-matching coaxial resonator having a symmetrical power distribution.
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