Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takeo Tsukamoto0
Date of Patent
March 26, 2024
0Patent Application Number
183502210
Date Filed
July 11, 2023
0Patent Citations
Patent Primary Examiner
Patent abstract
An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object, and a plurality of X-ray detectors, wherein each of the plurality of X-ray detectors detects X-rays emitted from a foreign substance existing on an inspection target surface of the inspection target object irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.
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