Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Vibhu Jindal0
Sanjay Bhat0
Date of Patent
March 26, 2024
0Patent Application Number
171105140
Date Filed
December 3, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
Provided herein are apparatus, systems and methods for processing reticle blanks. A reticle processing system includes a support assembly having a plate coupled to a frame, and a carrier base assembly supported on the support assembly. The carrier base assembly comprises a wall extending from a top surface of the carrier base and defining a containment region for a reticle.
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