US Patent 11947171 Optical waveguide element and manufacturing method thereof

There is provided an optical waveguide component capable of implementing highly efficient optical coupling of an optical element and suppressing a crosstalk between channels in performing hybrid integration. A PLC as an optical waveguide component employing an offset structure includes an input-output unit using a local portion of an inclined surface on the side of a core in an inclined groove of an optical path conversion unit to be loaded with an optical element as a mirror surface. The inclined groove is formed to be deeper than the core in a direction intersecting an emission direction of an optical signal in the core and perpendicular to a horizontal direction of a substrate. An offset unit in the horizontal direction of the substrate is provided to communicate with the inclined groove on the side of an opposite inclined surface opposing the mirror surface as the local portion of the inclined surface. When the mirror surface is coated with a reflective film via an offset unit, the reflective film can be accurately and simply formed.