Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chun-I Tsai0
Yu-Sheng Wang0
Chi-Cheng Hung0
Pei-Wen Wu0
Ming-Hsing Tsai0
Jyh-Cherng Sheu0
Date of Patent
April 9, 2024
0Patent Application Number
170217760
Date Filed
September 15, 2020
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
A metal adhesion layer may be formed on a bottom and a sidewall of a trench prior to formation of a metal plug in the trench. A plasma may be used to modify the phase composition of the metal adhesion layer to increase adhesion between the metal adhesion layer and the metal plug. In particular, the plasma may cause a shift or transformation of the phase composition of the metal adhesion layer to cause the metal adhesion layer to be composed of a (111) dominant phase. The (111) dominant phase of the metal adhesion layer increases adhesion between the metal adhesion layer.
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