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US Patent 11965852 Microelectromechanical sensor and sensing module thereof

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
April 12, 2022
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Date of Patent
April 23, 2024
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Patent Application Number
17719342
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Patent Citations
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US Patent 8449177 Vacuum sensor
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US Patent 9658179 System and method for a MEMS transducer
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US Patent 10843919 Microelectromechanical system apparatus with heater
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US Patent 10527571 CMOS-based semiconductor device on micro-hotplate and method of fabrication
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US Patent 11041838 Gas sensors including microhotplates with resistive heaters, and related methods
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US Patent 7892794 Method, chip, device and integrated system for detection biological particles
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US Patent 7963147 Micro gas sensor and method for manufacturing the same
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Patent Inventor Names
Pei-Chi Kuo
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Bor-Shiun Lee
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Ming-Fa Chen
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11965852
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Patent Primary Examiner
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Nathaniel T Woodward
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CPC Code
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G01N 27/128
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G01N 33/0062
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