US Patent 11969841 Transport system, transport method, and article manufacturing method

A transport system includes a transport path having at least two transporting modules, a carriage configured to move on the transport path, a controller provided on each of the two transporting modules and configured to drive the carriage in response to a drive command, and a sensor provided on each of the two transporting modules. The drive command is corrected with a distance between the sensors provided on the two transporting modules.